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Vacuum seal×フェローテックホールディングス - メーカー・企業と製品の一覧

Vacuum sealの製品一覧

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Vacuum Seal "Solid Shaft Fellow Seal"

Vacuum Seal "Solid Shaft Fellow Seal"

Set models according to a wide range of applications! High-quality seals compatible with all vacuum processing equipment.

At FerroTec Corporation, we provide high-quality seals compatible with all types of vacuum processing equipment. The "Solid Shaft Ferro Seal" comes in various models to suit a wide range of applications, including miniature type, through-hole type, flange type, and heavy-duty type. The shapes of the power connection end and the process end of the shaft, except for small diameter ones, are standardized with a key groove mechanism, and other options such as flat surfaces, threaded, and hole configurations are also available. 【Features】 - Water-cooled types are available that can handle high temperatures, high loads, and high-speed rotation (excluding some miniature and through-hole types). - Hermetic sealing is possible. - Prevents undetectable leaks. - Long life. For more details, please refer to the catalog or feel free to contact us.

  • Sealing

ブックマークに追加いたしました

ブックマーク一覧

ブックマークを削除いたしました

ブックマーク一覧

これ以上ブックマークできません

会員登録すると、ブックマークできる件数が増えて、ラベルをつけて整理することもできます

無料会員登録
Vacuum Seal "Multi-Process Fellow Seal"

Vacuum Seal "Multi-Process Fellow Seal"

Fellow seal for multi-axis mechanism compatible with wafer transport robots in a vacuum environment.

The "Multi-Process Fellow Seal" is equipped with a multi-axis mechanism that supports wafer transport robots in a vacuum environment for various current semiconductor processes, and we also offer linear motion compatibility. Furthermore, we have products that can accommodate ultra-high vacuum processes of 10⁻⁶ Pa. 【Features】 [Coaxial 2-Axis Type] ■ A compact, lightweight type that achieves high vibration and rotational accuracy. [3-Axis Type] ■ A high-rigidity type that achieves high vibration and rotational accuracy. [Coaxial 3-Axis Linear Motion Type] ■ A high-rigidity type that achieves high vibration and rotational accuracy while maintaining a coaxial 3-axis structure. For more details, please refer to the catalog or feel free to contact us.

  • Sealing

ブックマークに追加いたしました

ブックマーク一覧

ブックマークを削除いたしました

ブックマーク一覧

これ以上ブックマークできません

会員登録すると、ブックマークできる件数が増えて、ラベルをつけて整理することもできます

無料会員登録
Vacuum Seal "Hollow Shaft Fellow Seal"

Vacuum Seal "Hollow Shaft Fellow Seal"

Adopts a cartridge mechanism! A vacuum seal that can be combined with existing shafts.

At FerroTec Co., Ltd., we provide high-quality seals compatible with all types of vacuum processing equipment. The "Hollow Shaft Ferro Seal" features a cartridge mechanism that can be integrated with existing shafts. It is available in through-hole type, flange type, and cantilever type (compatible with active gases). Additionally, we offer a version without a clamp for fixing the shaft as an option. 【Features】 ■ The rotating shaft and the sleeve shaft of the cartridge are sealed statically by an O-ring. ■ The shaft and sleeve are fixed by a clamp. ■ Hermetic sealing is possible. ■ Prevents unmeasurable leaks. ■ Long life. For more details, please refer to the catalog or feel free to contact us.

  • Sealing

ブックマークに追加いたしました

ブックマーク一覧

ブックマークを削除いたしました

ブックマーク一覧

これ以上ブックマークできません

会員登録すると、ブックマークできる件数が増えて、ラベルをつけて整理することもできます

無料会員登録
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